MicroElectroMechanical Systems (MEMS) Lab

General Description

  • Facility used in the testing and assembly of micro- and nano-structures
  • Used to understand how MEMS devices operate differently in a vacuum environment
  • Lab also houses the equipment to mount ultra thin carbon foils (~10's of Å… thick)

Lab Capabilities

  • 4 high precision microprobes
  • Ion pump to limit vibrations (no moving parts)
  • Monitored with a long focal length microscope