General Description
- Facility used in the testing and assembly of micro- and nano-structures
- Used to understand how MEMS devices operate differently in a vacuum environment
- Lab also houses the equipment to mount ultra thin carbon foils (~10’s of Å… thick)
Lab Capabilities
- 4 high precision microprobes
- Ion pump to limit vibrations (no moving parts)
- Monitored with a long focal length microscope
![mems_lab](https://grad.space.swri.edu/wp-content/uploads/2020/09/mems_lab.png)